V. S. Bulychev, A. E. Dubinov, “Magnetron sputtering of tin from a liquid phase in a current stabilization mode”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2024, Volume 50, Issue 21,Pages <nobr>29

Magnetron sputtering of tin from a liquid phase in a current stabilization mode

V. S. Bulychev^abc, A. E. Dubinov^ac

^a Federal State Unitary Enterprise "Russian Federal Nuclear Center — All-Russian Research Institute of Experimental Physics", Sarov, Russia
^b Bauman Moscow State Technical University, Moscow, Russia
^c Sarov State Institute of Physics and Technology, Sarov, Nizhny Novgorod oblast, Russia

Abstract: The possibility of a magnetron sputtering system operation with a liquid-metal cathode is demonstrated in the paper. The experiments with sputtering of a tin cathode from a liquid state in a current stabilization mode were carried out. The coefficient of the cathode sputtering of tin from a liquid state was estimated.

Keywords: magnetron discharge, tin, sputtering.

Received: 14.05.2024
Revised: 25.06.2024
Accepted: 12.07.2024

DOI: 10.61011/PJTF.2024.21.58955.19990