Low-energy ion scattering with additional mass separation: instrumentation and application

Hardware implementation and application of the combined energy and mass spectrometric analysis of backscattered and sputtered ions are discussed. For a ternary jewelry alloy contained Au, Ag and Cu, it was shown that this method is able improving analytical sensitivity by suppressing the background related to sputtered ions, and with heavy Ar$^+$ ions to obtain information on the surface condition of a lanthanum sample and to detect backscattered and sputtered Ar$^{2+}$ ions on this surface.