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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2023 Volume 49, Issue 14, Pages 16–18 (Mi pjtf7027)

Growth of $\beta$-Ga$_2$O$_3$ single crystals by the solution-melt method

A. A. Kitsay, Yu. G. Nosov, A. V. Chikiryaka, V. I. Nikolaev

Ioffe Institute, St. Petersburg, Russia

Abstract: The modes of growth of Ga$_2$O$_3$ crystals from a solution of gallium oxide in a MoO$_3$ melt in the process of MoO$_3$ evaporation at a temperature of 1050$^\circ$C have been studied. It is shown that at this temperature the Ga$_2$O$_3$ crystalline phase is in equilibrium with the MoO$_3$ melt. As a result of the experiments, single crystals of $\beta$-Ga$_2$O$_3$ were obtained up to 1.5 mm in cross section. The composition and structure of the crystals were studied by X-ray diffraction and electron microscopy.

Keywords: gallium oxide, crystal growth, wide gap semiconductor.

Received: 12.04.2023
Revised: 12.04.2023
Accepted: 16.05.2023

DOI: 10.21883/PJTF.2023.14.55819.19589



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