S. A. Khlebnikov, A. A. Solovykh, Yu. A. Mankelevich, E. N. Voronina, “N<nobr>$_2$</nobr> plasma interaction with molybdenum disulfide monolayers”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2023, Volume 49, Issue 18,Pages <nobr>8

N$_2$ plasma interaction with molybdenum disulfide monolayers

S. A. Khlebnikov^ab, A. A. Solovykh^ab, Yu. A. Mankelevich^a, E. N. Voronina^ab

^a Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics, Moscow, Russia
^b Lomonosov Moscow State University, Moscow, Russia

Abstract: Based on ab initio DFT simulation results, the main processes of the interaction of thermal N atoms with MoS$_2$ monolayers are revealed, potential mechanisms of defect formation by low-energy ions N$_2^+$ are described, and the ion threshold energy required to sulfur removal is estimated.

Keywords: molybdenum disulfide, monolayer, plasma, radicals, ions, simulation.

Received: 25.05.2023
Revised: 13.07.2023
Accepted: 13.07.2023

DOI: 10.21883/PJTF.2023.18.56169.19640