Vacuum (gasless) DC magnetron discharge with a cold planar target-cathode

A stable mode of a gasless (vacuum) magnetron discharge with a cold planar cathode-target at a residual pressure as low as 4 $\cdot$ 10$^{-3}$ Pa and a discharge current of 8–12 A (120–200 mA/cm$^2$) is realized. The results of studies of mass-to-charge ion composition are presented, as well as a comparison of main discharge parameters and a deposition rate in gaseous and vacuum modes.