Probe methods of diagnostics of parameters of induction-coupled plasma maintained in a volatile halide gas mix

In this paper, the results of the measurement of the local electron energy distribution function in an induction-coupled plasma discharge maintained in a flow of volatile halides at low-pressure are presented. A moveable electric probe with a short exposure time in plasma was used, which significantly reduces the erosive effect of the chemical active medium on the electrodes. Numerical methods of processing volt-ampere characteristics are discussed, which make it possible to identify the features of the electron energy distribution function in a high-energy region.