Development of the plasma electron spectroscopy method for the detection of complex chemical compounds

The expansion of the capabilities of the plasma electron spectroscopy method for the analysis of complex chemical compounds and their fragments has been demonstrated. Since the energies of the detected Penning electrons are different for different chemical compounds, an important advantage of the method used is the possibility of simultaneous (in one measurement) registration of various impurities. The developed microplasma detector can serve as a prototype of a gas analyzer based on non-local negative-glow plasma of a short glow discharge in helium.