Study of structural and reflective characteristics of multilayer X-ray mirrors based on a pair of Ru/B materials

The paper presents the results of a study of the reflective characteristics at wavelengths of 0.154, 0.989 and 1.76 nm and the structural characteristics reconstructed from these data of multilayer Ru/B X-ray mirrors without interlayers and with carbon interlayers. The deposition of C interlayers on the B-on-Ru boundary resulted in a decrease of the transition region length from 0.69 to 0.37 nm. The calculated reflectivity of the Ru/C/B structure at a wavelength of 6.65 nm, performed using the obtained structural parameters of the mirrors, amounted to a record 68.9%.