A. B. Tolstoguzov, S. Gusev, D. J. Fu, “Interaction of molecular oxygen ions with copper surface: features of the energy spectra of sputtered and backscattered ions”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2022, Volume 48, Issue 7,Pages <nobr>47

Interaction of molecular oxygen ions with copper surface: features of the energy spectra of sputtered and backscattered ions

A. B. Tolstoguzov^abc, S. Gusev^a, D. J. Fu^c

^a Ryazan State Radio Engineering University, Ryazan, Russia
^b Centre for Physics and Technological Research, Universidade Nova de Lisboa, Caparica, Portugal
^c Key Laboratory of Artificial Micro- and Nanostructures of Ministry of Education and Hubei Key Laboratory of Nuclear Solid Physics, School of Physics and Technology, Wuhan University, Wuhan, China

Abstract: An experimental study on the energy spectra of ions emitted from the surface of a polycrystalline Cu target under the bombardment by 2 keV O$_2^+$ molecular ions was carried out. Sputtered atomic ions Cu$^+$ and O$^+$ were prevailed among the positively charged secondary ions, and among the negative ions, in addition to sputtered ions Cu$^-$, CuO$_2^-$, O$^-$, and O$_2^-$, intense elastically and inelastically backscattered O$^-$, and O$_2^+$ ions were revealed.

Keywords: energy spectra, ion sputtering, backscattered ions, charge exchange.

Received: 22.11.2021
Revised: 02.02.2022
Accepted: 02.02.2022

DOI: 10.21883/PJTF.2022.07.52294.19088