Failure regions resembling geometrical shapes in sliding naation of Si–C–N thin films used for N/MEMS

The failure regions during sliding nano indentation of technologically important SiCN thin films resembled geometrical shapes of Lemniscate and cardiod. An adhesive strength of 9 GPa was estimated. The failure followed two different stress regimes, one tangential responsible for the wear and the other axial responsible for the film/substrate adhesion. EDS spectra of the scratched region shown complete adhesive failure.