Study of optical and photocatalytic properties of titanium oxide films with different oxidation degree

The results of studies of the optical and photocatalytic properties of titanium oxide films deposited by vacuum-arc evaporation in an oxygen-containing atmosphere are presented. It was experimentally shown that films of different degrees of oxidation are formed during deposition, depending on the amount of oxygen flow entering the working chamber. The results of studies of the obtained films showed that the films obtained in a transitional mode between the deposition of metallic Ti films and dielectric TiO$_2$ films have the maximum photocatalytic activity. This deposition mode is observed at the oxygen flow into the working chamber from 9 to 12 cm$^3$/min.