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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2022 Volume 48, Issue 19, Pages 16–19 (Mi pjtf7409)

Investigation of metal–insulator–semiconductor structure based on CdHgTe and HfO$_2$

D. V. Gorshkov, E. R. Zakirov, G. Yu. Sidorov, I. V. Sabinina, D. V. Marin

Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk, Russia

Abstract: The interface between Cd$_{0.22}$Hg$_{0.78}$Te and HfO$_2$ grown by plasma-enhanced atomic layer deposition at a temperature of 120$^\circ$C in a specifically optimized deposition mode has been studied. The method used in this work for measuring the admittance of metal–dielectric–semiconductor structures made it possible to establish that their electrophysical parameters are uniform over the sample surface. The spectrum of fast surface states density at the HfO$_2$–Cd$_{0.22}$Hg$_{0.78}$Te interface has been calculated.

Keywords: CdHgTe, HfO$_2$, ALD, C–V, passivating coating.

Received: 14.06.2022
Revised: 11.08.2022
Accepted: 17.08.2022

DOI: 10.21883/PJTF.2022.19.53589.19279



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