D. V. Lopaev, D. E. Melezhenko, A. I. Zotovich, E. N. Voronina, “Study of H, N, and O atom interaction with quasi-two-dimensional molybdenum disulfide”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2022, Volume 48, Issue 22,Pages <nobr>28

Study of H, N, and O atom interaction with quasi-two-dimensional molybdenum disulfide

D. V. Lopaev^ab, D. E. Melezhenko^a, A. I. Zotovich^a, E. N. Voronina^ab

^a Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics, Moscow, Russia
^b Lomonosov Moscow State University, Faculty of Physics, Moscow, Russia

Abstract: The paper presents the results of the experimental study of O, N, and H atom interaction with ultra-thin MoS$_2$ films demonstrating changes in properties of the surface layer of samples under investigation.

Keywords: quasi-two-dimensional materials, molybdenum disulfide, plasma, ions, surface modification.

Received: 02.08.2022
Revised: 29.09.2022
Accepted: 30.09.2022

DOI: 10.21883/PJTF.2022.22.53803.19330