Abstract:
For the first time, $\beta$-Ga$_2$O$_3$ ceramics were synthesized with the using gas-thermal plasma deposition method (synthesis rate of 2 $\mu$m/s). The results of studying its microscopic parameters, structural and phase composition, and cathodoluminescent properties are presented. The intrinsic cathodoluminescence spectrum contains only a broad blue band, which, as a result of deconvolution, is divided into two bands with maxima in the spectral regions of 426 and 488 nm. The band in the 426 nm region has the highest intensity. Increasing the energy of incident electrons from 40 to 70 keV leads to only minor changes in the cathodoluminescence spectrum, which is associated with the peculiarities of the nature of the emission centers.