Energy spectra of sputtered atoms during proton bombardment of solid targets

The average energy of sputtered atoms and their energy spectrum are important for calculating the influx of impurities – the first wall material into the plasma. The energy characteristics of sputtered atoms are considered for the cases of H–Be and H–W. The dependence of the average energy of sputtered particles on the collision energy is calculated. Taking into account the energy spectrum of backscattered bombarding ions and analyzing possible sputtering mechanisms allowed us to achieve good agreement with the results of computer modeling.