Abstract:
The influence of the composition and pressure of the working gas on the structural properties of strontium-barium niobate films obtained by high-frequency magnetron sputtering on polycrystalline aluminum oxide substrates was studied. The pressure and ratio of oxygen and argon in the working gas at which a film with a predominant orientation (00$l$) is formed on alumina were determined. This is the first successful attempt to form predominantly oriented strontium-barium niobate films of high structural quality on polycrystalline aluminum oxide substrates.