Abstract:
It is shown that implantation of Co$^+$ ions with an energy of 40 keV and a high dose of 1.25 $\cdot$ 10$^{17}$ ion/cm$^2$ into a thin epitaxial TiO$_2$ film heated to 873 K induces ferromagnetism with a Curie temperature above room temperature. According to the analysis of presented experimental data, the observed ferromagnetism is mainly due to the formation of cobalt nanoparticles of about 30 nm in size in the implanted TiO$_2$ film.