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// Pisma v Zhurnal Tekhnicheskoi Fiziki
// Archive
Pisma v Zhurnal Tekhnicheskoi Fiziki,
1985
Volume 11,
Issue 3,
Pages
144–148
(Mi pjtf764)
Laser-radiated selective etching of chromium thin-films
V. P. Koronkevich
,
A. G. Poleshchuk
,
E. G. Churin
,
Yu. I. Yurlov
Institute of Automation and Electrometry, Siberian Branch of Russian Academy of Sciences, Novosibirsk
Received:
27.06.1984
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Steklov Math. Inst. of RAS
, 2024