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JOURNALS // Pisma v Zhurnal Tekhnicheskoi Fiziki // Archive

Pisma v Zhurnal Tekhnicheskoi Fiziki, 1985 Volume 11, Issue 3, Pages 144–148 (Mi pjtf764)

Laser-radiated selective etching of chromium thin-films

V. P. Koronkevich, A. G. Poleshchuk, E. G. Churin, Yu. I. Yurlov

Institute of Automation and Electrometry, Siberian Branch of Russian Academy of Sciences, Novosibirsk

Received: 27.06.1984



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