Properties of contact coatings based on ruthenium nanofilms for MEMS switches

Switching properties of contact coatings based on ruthenium nanofilms obtained by electrochemical deposition have been studied. The laws of variation of the contact resistance as a function of the number of switching cycles are established as dependent on the coating thickness and surface roughness. Optimum parameters of contact coatings are determined that ensure minimum contact resistance of switches for micro-electromechanical systems (MEMS) operating in steady-state regimes.