Abstract:
The effect of irradiation with H$^+$ and Ne$^+$ ions with an energy of 150 keV on memristive Au/SiO$_x$/TiN/Ti structures, which were obtained by magnetron sputtering and exhibited a reproducible resistive switching effect, is studied. It is demonstrated that the low and high resistance states remain unchanged up to a dose of 1 $\cdot$ 10$^{16}$ cm$^{-2}$ in the case of irradiation with H$^+$ ions and a dose of $\sim$ 3 $\cdot$ 10$^{15}$ cm$^{-2}$ under irradiation with Ne$^+$ ions. The obtained results demonstrate the high tolerance of parameters of the studied memristive structures to both ionizing radiation and displacement damage.