Abstract:
The influence of the light of a low-power light-emitting diode on the adsorption processes in SnO$_2$ sensor layers of test structures of gas sensors has been analyzed. It is established that the optical activation of SnO$_2$ surface induces an additional peak of gas sensitivity at temperatures that are lower than the temperature of maximum gas sensitivity of the sensor without illumination. The results indicate that there are two mechanisms of light stimulation of gas adsorption.