Formation of a diamond-like carbon film by magnetron sputtering of a graphite target under radiation flux from a black-body model

A method of depositing a film (under a radiation flux from a high-temperature black-body model) by magnetron sputtering of a graphite target has been implemented. The elemental composition and structure of deposited films have been analyzed by X-ray photoelectron spectroscopy and characteristic electron-energy-loss spectroscopy. The investigations have shown that chemically pure diamond-like films can be formed at a radiation-flux density no less than 1.5 $\times$ 10$^{-4}$ W/m$^2$ in the spectral range of 170–255 nm.