Properties of dust particles formed upon sputtering of a barium strontium titanate ceramic target in plasma of high-frequency discharge in oxygen

We have studied the behavior and properties of dust particles formed upon sputtering of a barium strontium titanate Ba(0.8)Sr(0.2)TiO$_3$ ceramic target in plasma of capacitive high-frequency discharge in oxygen. The particles were accumulated in potential traps situated near the target at a remote position of the substrate. Dependences of the density of accumulated dust on the pressure, discharge power, substrate position, and substrate voltage were determined using laser-radiation scattering. The dimensions and composition of collected dust particles were determined.