S. A. Blokhin, A. G. Kuz'menkov, A. G. Gladyshev, A. P. Vasil'ev, A. A. Blokhin, M. A. Bobrov, N. A. Maleev, V. M. Ustinov, “Precise calibration of thickness and composition of epitaxial AlGaAs heterostructures with vertical-cavity optical microresonators”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2014, Volume 40, Issue 24,Pages <nobr>22

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Precise calibration of thickness and composition of epitaxial AlGaAs heterostructures with vertical-cavity optical microresonators

S. A. Blokhin^a, A. G. Kuz'menkov^ab, A. G. Gladyshev^ab, A. P. Vasil'ev^ab, A. A. Blokhin^ac, M. A. Bobrov^a, N. A. Maleev^a, V. M. Ustinov^a

^a Ioffe Institute, St. Petersburg
^b Submicron Heterostructures for Microelectronics Research and Engineering Center, Russian Academy of Sciences, St. Petersburg
^c Peter the Great St. Petersburg Polytechnic University

Abstract: We have studied the possibility of determining the actual thicknesses and compositions of separate layers in AlGaAs heterostructures with vertical-cavity optical microresonators by the combined use of optical reflectance spectroscopy and X-ray diffraction. It is established that a self-consistent solution of two inverse problems with the aid of a special test heterostructure partly removes the problem of solution ambiguity and increases the absolute accuracy of determination of the parameters of individual epitaxial layers.

Received: 05.08.2014