Abstract:
A charge leakage in LaScO$_3$ nanolayers on a Si substrate has been investigated by Kelvin probe microscopy. A charge leakage from the LaScO$_3$ layer to the LaScO$_3$/Si interface layer with a subsequent lateral charge spreading in the interface layer and simultaneous leakage to the Si substrate has been revealed in this system. A lateral charge spreading has not been directly observed in the LaScO$_3$ layer.