A. I. Zhmakin, I. P. Ipatova, Yu. N. Makarov, A. A. Fursenko, “Numerical modeling of <nobr>$Ga\,As$</nobr> film growth in flow gas-epitaxial reactors”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 1985, Volume 11, Issue 13,Pages <nobr>794

JOURNALS // Pisma v Zhurnal Tekhnicheskoi Fiziki // Archive

Pisma v Zhurnal Tekhnicheskoi Fiziki, 1985 Volume 11, Issue 13, Pages 794–799 (Mi pjtf919)

Numerical modeling of $Ga\,As$ film growth in flow gas-epitaxial reactors

A. I. Zhmakin, I. P. Ipatova, Yu. N. Makarov, A. A. Fursenko

Ioffe Physico-Technical Institute USSR Academy of Sciences, Leningrad

Received: 30.04.1985

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