Deposition of YBCO films on both sides of substrate by magnetron sputtering

We have studied features of the formation of YBa$_2$Cu$_3$O$_{7-\delta}$ (YBCO) films on both sides of sub-strates by magnetron sputtering in the on-axis geometry. During sputter deposition onto the first (front) side, a thin film is simultaneously formed on the second (rear) side, which can provide a high-quality sublayer for the final coating of preset thickness deposited at the subsequent stage. It is shown that, by monitoring the properties of a sublayer formed on the rear side of substrate during YBCO layer growth on the front side, it is possible to optimize technological parameters of the process.