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// Pisma v Zhurnal Tekhnicheskoi Fiziki
// Archive
Pisma v Zhurnal Tekhnicheskoi Fiziki,
1985
Volume 11,
Issue 17,
Pages
1025–1030
(Mi pjtf974)
Nanosecond single-pulsive laser lithography
A. L. Bogdanov
,
K. A. Valiev
,
L. V. Velikov
,
D. Yu. Zaroslov
,
A. M. Prokhorov
General Physics Institute of the Academy of Sciences of the USSR, Moscow
Received:
12.06.1985
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Steklov Math. Inst. of RAS
, 2024