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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2026 Volume 52, Issue 7, Pages 16–21 (Mi pjtf9763)

Influence of buffer layer design on the photoluminescence of InAs quantum dots grown on GaAs/Si(100) substrates

V. V. Lendyashovaab, V. G. Talalaeva, D. A. Kirilenkoc, A. A. Kalinicheva, T. Shugabaevab, V. A. Pozdeevb, A. S. Andreevaab, I. V. Shtromd, R. R. Reznikab, G. È. Cirlinabcd, I. V. Ilkivab

a Saint Petersburg State University
b Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, St. Petersburg
c Ioffe Institute, St. Petersburg
d Institute for Analytical Instrumentation, Russian Academy of Sciences, St. Petersburg

Abstract: The synthesis of GaAs layers on on-axis Si(100) substrates using a Si buffer layer is presented. It is shown that the use of an elastically strained In$_{0.1}$Ga$_{0.9}$As layer and In$_{0.15}$Ga$_{0.85}$As/GaAs superlattices, combined with cyclic thermal annealing, makes it possible to obtain relatively thin templates with smooth surfaces and a surface dislocation density of $\sim$8$\Omega$10$^7$ ñm$^{-2}$. Heterostructures with quantum dots based on such buffer layers exhibit photoluminescence at $\lambda\approx$ 1250 nm at 300 K and carrier lifetimes comparable to those of similar structures grown on lattice-matched GaAs substrates. The obtained results demonstrate the feasibility of creating efficient light-emitting quantum dot heterostructures on silicon.

Keywords: indium gallium arsenide, quantum dots in a quantum well, molecular beam epitaxy, semiconductors, silicon, transmission electron microscopy, photoluminescence.

Received: 21.10.2025
Revised: 03.12.2025
Accepted: 04.12.2025

DOI: 10.61011/PJTF.2026.07.62516.20539



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© Steklov Math. Inst. of RAS, 2026