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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1985 Volume 11, Issue 18, Pages 1110–1113 (Mi pjtf994)

This article is cited in 1 paper

Crystallization and the effect of the annealing macrodefects during the process of high dense ionic implantation of semiconducting crystals

V. S. Andreev, S. B. Efimov, F. F. Komarov, A. P. Novikov, T. T. Samoiluk, V. S. Solov'ev, S. Yu. Shiryaev

A. N. Sevchenko Research Institute of Applied Physical Problems, Belarusian State University, Minsk

Received: 17.06.1985



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