A. A. Papin, A. P. Mazhirin, “Example of an exact solution of the problem of the distribution of an ionized impurity in the surface region of a semiconductor”, Prikl. Mekh. Tekh. Fiz., 1998, Volume 39, Issue 4,Pages <nobr>17

Example of an exact solution of the problem of the distribution of an ionized impurity in the surface region of a semiconductor

A. A. Papin^a, A. P. Mazhirin^b

^a Altai State University, Barnaul 656099
^b Institute of Semiconductor Physics, Siberian Division, Russian Academy of Sciences, Novosibirsk 630090

Abstract: An exact solution of the nonlinear problem of determining the electrostatic potential and the distribution profile of an ionized impurity in the surface region of a semiconductor is constructed.

UDC: 517.93+537.33

Received: 29.07.1996
Accepted: 28.11.1996