Synthesis of diamonds from the microwave plasma with the use of supersonic gas flows

A new method of deposition of diamond films with the use of supersonic gas flows activated by a superhigh-frequency discharge is implemented for the first time. The operation principle of the proposed gas-discharge system is similar to that of a microwave electrothermal rocket engine. A mixture of hydrocarbons and hydrogen is used as a plasma-forming gas. It is demonstrated that the proposed method allows the plasma-forming gas to be used at pressures far above the upper limit of the working pressures of modern gas-discharge devices of film deposition in the plasma generated by a superhigh-frequency discharge (approximately 40000 Pa).