Investigation of light scattering and optical strength of coatings in the ultraviolet range

A study was made of the optical strength of and scattering of ultraviolet radiation in single-layer and multilayer mirror coatings made of metal oxides and fluorides. It was found that $(ZrO_2/SmF_3)^6ZrO_2$ and $(HfO_2/SiO_2)^6HfO_2$ coatings (with 6 pairs of layers) were characterized by the weakest scattering and the highest optical strength (exceeding 100 MW/cm${}^2$).