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Kvantovaya Elektronika, 1980 Volume 7, Number 5, Pages 1132–1133 (Mi qe10239)

Brief Communications

Fabrication of thin-film waveguides from glassy chalcogenide semiconductors by laser evaporation

Yu. A. Bykovskiĭ, V. S. Gerasimenko, A. V. Mironos, V. L. Smirnov, V. V. Khiminets

Moscow Engineering Physics Institute

Abstract: An experimental study was made of waveguide structures constructed from glassy chalcogenide semiconductors by laser evaporation. Dependence of the attenuation coefficient on the evaporation conditions was determined. A range of compositions of the $As-Se$ system was selected for practical application in the fabrication of high-quality thin-film waveguides. Methods for improving further the characteristics of such waveguides were considered.

UDC: 621.373.826.038.825.4

PACS: 42.80.Lt, 81.10.Bk

Received: 11.11.1979


 English version:
Soviet Journal of Quantum Electronics, 1980, 10:5, 652–653

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