N. N. Kolachevsky, E. Louis, E. Spiller, M. M. Mitropol'skii, F. Bijkerk, E. N. Ragozin, “Spectral characteristics of multilayer cobalt—carbon mirrors for the λ ≈ 7.5 nm range”, Kvantovaya Elektronika, 1997, Volume 24, Number 8,Pages <nobr>731

This article is cited in 1 paper

LASER SYSTEM COMPONENTS AND DEVICES. CAVITIES, MIRRORS

Spectral characteristics of multilayer cobalt—carbon mirrors for the λ ≈ 7.5 nm range

N. N. Kolachevsky^a, E. Louis^b, E. Spiller^c, M. M. Mitropol'skii^a, F. Bijkerk^b, E. N. Ragozin^a

^a P. N. Lebedev Physical Institute, Russian Academy of Sciences, Moscow
^b FOM Institute for Plasma Physics Rijnhuizen, Nieuwegein, The Netherlands
^c IBM T. J. Watson Research Center, New York, USA

Abstract: Multilayer cobalt—carbon mirrors on Si(111) substrates were made by electron-beam deposition and polishing of the metal layers by Kr⁺ ion bombardment. A new spectroscopic method was developed for estimating the parameters of plane multilayer x-ray mirrors by illuminating a sample with broad-band radiation from a laser-plasma source and by subsequent dispersion of this radiation with a diffraction grating operating in the transmission mode.

PACS: 07.85.Fv, 81.15.Ji

Received: 14.11.1996