Spatial features of laser deposition of amorphous Co – Fe – B – Si magnetic films in an inhomogeneous magnetic field

An investigation was made of the magnetic characteristics of magnetic films formed on silicon substrates by laser ablation of bulk targets which had the Co_68.15Fe_4.35B₁₅Si_12.5 composition and a compensated magnetostriction. It was established for the first time that an inhomogeneous magnetic field perpendicular to the substrate could improve the soft magnetic properties of films. Such a field of maximum intensity 2.4 kOe could distort the spatial structure of a laser plume by focusing it on the substrate, which would increase the film deposition rate. The dependences of the coercivity and of the anisotropy field on the substrate temperature had a minimum. An analysis was made of the influence of the substrate orientation, relative to the laser plume, on the magnetic properties and on the film deposition rate.