Operation of a KrF electron-beam laser at high specific excitation powers and energies

An experimental investigation was made of the operation of a KrF electron-beam laser operating under conditions of high specific powers and excitation energies. An optimal Ar–Kr–F₂ gas mixture operating at a pressure of 5 atm ensured a specific output energy of 60 J/liter and an efficiency of ≈ 6%. The electrodynamic effects of the interaction of the electron beam with the plasma influenced the laser efficiency.