T. T. Basiev, A. Ya. Karasik, V. V. Osiko, A. G. Papashvili, D. S. Chunaev, A. V. Gavrilov, M. N. Ershkov, S. N. Smetanin, S. A. Solokhin, A. V. Fedin, V. N. Kolokol'tsev, V. M. Lazorenko, V. I. Tovtin, “Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F2- lasers”, Kvantovaya Elektronika, 2009, Volume 39, Number 4,Pages 385

This article is cited in 1 paper

Laser technologies

Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F₂^- lasers

T. T. Basiev^a, A. Ya. Karasik^a, V. V. Osiko^b, A. G. Papashvili^a, D. S. Chunaev^a, A. V. Gavrilov^c, M. N. Ershkov^c, S. N. Smetanin^c, S. A. Solokhin^c, A. V. Fedin^c, V. N. Kolokol'tsev^d, V. M. Lazorenko^d, V. I. Tovtin^d

^a Laser Materials and Technology Research Center, Prokhorov General Physics Institute, RAS, Moscow
^b A. M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow
^c Kovrov State Technological Academy
^d A. Baikov Institute of Metallurgy and Materials Science, Russian Academy of Sciences, Moscow

Abstract: The picosecond (based on Nd:YLF — LiF:F₂^- crystals) and nanosecond (Nd:YAG — LiF:F₂^-) laser technologies are proposed for perforating closely spaced micron holes in aluminium foil for microelectronics, medicine, and biology. Two-dimensional matrices of holes with diameters of 2 — 20 μm spaced from each other by 8 — 30 μm are obtained in 20-μm-thick aluminium foil. It is shown that it is possible to increase the hole density and decrease their diameter by controlling the laser irradiation regime. A sample of perforated aluminium foil is obtained with the total area of micron holes comprising 30% of the entire surface.

PACS: 42.62.Cf, 42.55.Rz

Received: 02.06.2008
Revised: 25.11.2008