K. S. Gochelashvili, M. E. Zemskov, O. N. Evdokimova, V. T. Mikhkel'soo, A. M. Prokhorov, “Laser spectroscopy of the products of photoevaporation with a short-wavelength (λ = 193 nm) excimer laser”, Kvantovaya Elektronika, 1999, Volume 26, Number 2,Pages <nobr>168

Laser applications and other topics in quantum electronics

Laser spectroscopy of the products of photoevaporation with a short-wavelength (λ = 193 nm) excimer laser

K. S. Gochelashvili^a, M. E. Zemskov^a, O. N. Evdokimova^a, V. T. Mikhkel'soo^b, A. M. Prokhorov^c

^a Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow
^b Institute of Organic Chemistry, Tartu State University, Estonia
^c Natural Sciences Center at General Physics Institute of RAS, Moscow

Abstract: An excimer laser spectrometer was designed and constructed. It consists of a high-vacuum interaction chamber, a short-wavelength (λ = 193 nm) excimer ArF laser used for evaporation, a probe dye laser pumped by an XeCl excimer laser, and a system for recording a laser-induced fluorescence signal. This spectrometer was used to investigate nonthermal mechanisms of photoevaporation of a number of wide-gap dielectrics.

PACS: 07.60.Rd, 42.62.Eh, 42.62.Cf

Received: 06.11.1998