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JOURNALS // Kvantovaya Elektronika // Archive

Kvantovaya Elektronika, 2013 Volume 43, Number 9, Pages 791–794 (Mi qe15218)

This article is cited in 4 papers

Nanogradient dielectric coatings and metamaterials

Fabrication of nanogradient coatings for laser devices using the method of magnetron sputtering

N. F. Abramova, O. D. Volpyana, Yu. A. Oboda, R. V. Dronskiib

a Polyus Research and Development Institute named after M. F. Stel'makh, Moscow
b "Fotron-Auto" Scientific Manufacture Enterprise, Moscow

Abstract: Significant advantages of the magnetron sputtering method for producing complex high-quality optical coatings for laser devices are shown. Technology aspects of efficient fabrication of such coatings are considered. The capabilities of the developed automated technological and control equipment are described.

Keywords: nanogradient coatings, magnetron deposition, thin film elements, optical coatings.

PACS: 78.67.Pt, 52.77.Dq

Received: 24.04.2013
Revised: 09.08.2013


 English version:
Quantum Electronics, 2013, 43:9, 791–794

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