Kvantovaya Elektronika, 2014 Volume 44, Number 4, Pages 317–321
(Mi qe15219)
This article is cited in
16 papers
Interaction of laser radiation with matter
Formation of micron and submicron structures on a zirconium oxide surface exposed to nanosecond laser radiation
D. V. Ganin a ,
S. I. Mikolutskiy b ,
V. N. Tokarev c ,
V. Yu. Khomich b ,
V. A. Shmakov c ,
V. A. Yamshchikov b a Physics Instrumentation Center, A. M. Prokhorov General Physics Institute, Troitsk, Moscow region
b Institute of Problems of Electrophysics of the Russian Academy of Sciences, St. Petersburg
c A. M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow
Abstract:
Possibility of forming quasi-periodic structures of micron and submicron dimensions on a surface of zirconium dioxide under the action of eximer ArF laser radiation is shown experimentally and theoretically.
Keywords:
nanosecond laser radiation, zirconium dioxide, submicron structures, thermal stress.
PACS:
42.62.Cf ,
73.20.Mf Received: 24.04.2013
Revised: 07.11.2013
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