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Kvantovaya Elektronika, 2015 Volume 45, Number 3, Pages 189–192 (Mi qe16131)

This article is cited in 1 paper

Lasers

Generation of picosecond UV pulses by an Nd3+:YAG laser for amplification in an ArF amplifier

S. P. Sadovskiya, P. A. Chizhova, V. V. Bukina, V. M. Brendel'a, T. V. Dolmatova, Yu. N. Polivanova, N. S. Vorob'eva, A. V. Smirnova, S. V. Garnovab, S. K. Vartapetovc

a A. M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow
b National Engineering Physics Institute "MEPhI", Moscow
c Physics Instrumentation Center, A. M. Prokhorov General Physics Institute, Troitsk, Moscow region

Abstract: The scheme generating UV pulses with a duration 15 ps and output energy up to 11.5 mJ is implemented in the system consisting of a picosecond Nd3+:YAG laser with multistage nonlinearoptical conversion of fundamental frequency radiation into radiation with a wavelength 193 nm followed by an excimer ArF amplifier. The temporal characteristics and the contrast of the amplified pulses are measured.

Keywords: picosecond laser pulse, travelling-wave parametric oscillator, excimer ArF amplifier.

PACS: 42.55.Rz, 42.60.By, 42.55.Lt

Received: 03.06.2014
Revised: 25.09.2014


 English version:
Quantum Electronics, 2015, 45:3, 189–192

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