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Kvantovaya Elektronika, 2016 Volume 46, Number 10, Pages 903–910 (Mi qe16479)

This article is cited in 4 papers

Interaction of laser radiation with matter

Study of the formation of a microrelief on ZnSe- and CdSe-crystal surfaces ablated by excimer KrF-laser radiaton

S. K. Vartapetova, A. V. Zakhryapab, V. I. Kozlovskycd, Yu. V. Korostelinc, V. A. Mikhailova, Yu. P. Podmar'kovc, I. Yu. Porofeeva, D. E. Sviridovc, Ya. K. Skasyrskyc, M. P. Frolovc, I. M. Yutkinb

a Physics Instrumentation Center, A. M. Prokhorov General Physics Institute, Troitsk, Moscow region
b Federal State Unitary Enterprise "Russian Federal Nuclear Center — All-Russian Research Institute of Experimental Physics", Sarov, Nizhny Novgorod region
c P. N. Lebedev Physical Institute, Russian Academy of Sciences, Moscow
d National Nuclear Research University

Abstract: One-dimensional gratings with a period of 0.5 – 2.3 μm are formed on the surfaces of CdSe and ZnSe crystals ablated by two interfering radiation beams of a nanosecond excimer KrF laser. Investigated are the dependences of the shape and depth of gratings on the energy density under irradiation by a single pulse, and on the number of pulses at a given energy density. The maximum grating depth is estimated as ~0.57 of the period. By forming a one-dimensional grating with a period of 1.5 μm and a depth of 0.53 μm on the CdSe-crystal surface, this surface becomes antireflective at a wavelength of 4 μm. The surface reflectivity is reduced by 88%. A possibility of forming two-dimensional gratings having periods of 1 and 1.5 μm is demonstrated.

Keywords: antireflection surface micro-relief, mid-IR range, II–VI crystals, laser ablation, excimer KrF laser.

Received: 09.06.2016


 English version:
Quantum Electronics, 2016, 46:10, 903–910

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