A. M. Skvortsov, V. P. Veiko, C. T. Huynh, D. S. Polyakov, A. M. Tamper, “Modification of the SiO<sub>2</sub>/Si interface by pulsed fibre laser radiation”, Kvantovaya Elektronika, 2017, Volume 47, Number 6,Pages <nobr>503

This article is cited in 1 paper

Interaction of laser radiation with matter. Laser plasma

Modification of the SiO₂/Si interface by pulsed fibre laser radiation

A. M. Skvortsov^a, V. P. Veiko^a, C. T. Huynh^b, D. S. Polyakov^a, A. M. Tamper^a

^a St. Petersburg National Research University of Information Technologies, Mechanics and Optics
^b Quy Nhon University, Viet Nam

Abstract: We report a detailed study of structural modification of the silicon–silica interface under the effect of laser pulses at a wavelength of 1.07 μm. A thermal oxide layer on the silicon surface has been shown to have a significant effect on the defect formation process and surface microstructuring because of the complex stress state of such a structure.

Keywords: silicon–silica interface, microstructuring, dislocations, micromelting, fibre laser.

Received: 24.03.2017