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Kvantovaya Elektronika, 2018 Volume 48, Number 7, Pages 662–666 (Mi qe16849)

Laser applications and other topics in quantum electronics

Reflective mode X-ray microscopy of inclined objects

I. A. Artyukov, A. S. Busarov, A. V. Vinogradov, N. L. Popov

P. N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow

Abstract: We propose an optical configuration of a reflective mode X-ray microscope which operates by the reflection of radiation incident on an object at grazing incidence. Primary emphasis is placed on the image recording with minimal aberrations. Numerical simulations are used to estimate the spatial resolution and the field of view, and a comparison is made with the results of investigation of surface-modified objects with a reflective mode X-ray laser microscope operating at a wavelength of 13.9 nm.

Keywords: X-ray microscopy, X-ray lasers, coherent optics, inclined object, Fresnel integral.

Received: 28.01.2018
Revised: 26.04.2018


 English version:
Quantum Electronics, 2018, 48:7, 662–666

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© Steklov Math. Inst. of RAS, 2024