M. M. Barysheva, S. A. Garakhin, S. Yu. Zuev, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, N. I. Chkhalo, S. Yulin, “Comparison of approaches in the manufacture of broadband mirrors for the EUV range: aperiodic and stack structures”, Kvantovaya Elektronika, 2019, Volume 49, Number 4,Pages <nobr>380

This article is cited in 10 papers

Special issue 'Extreme light fields and their interaction with matter'

Comparison of approaches in the manufacture of broadband mirrors for the EUV range: aperiodic and stack structures

M. M. Barysheva^a, S. A. Garakhin^a, S. Yu. Zuev^a, V. N. Polkovnikov^a, N. N. Salashchenko^a, M. V. Svechnikov^a, N. I. Chkhalo^a, S. Yulin^b

^a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
^b Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Germany

Abstract: We have developed the design and experimentally studied aperiodic and stack broadband Mo/Si mirrors for the purposes of the KORTES project, optimised for uniform reflection in the 17–21 nm wavelength range. It is shown that stack structures with an insignificant loss in the reflection coefficient are much more preferable from the point of view of manufacturing and certification, which, in turn, makes it possible to correct the deposition process and to reach the calculated parameters of a multilayer mirror in a small number of iterations.

Keywords: EUV, broadband mirrors, aperiodic structures, block structures, stack structures, magnetron sputtering, inverse problem.

Received: 06.03.2019