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Kvantovaya Elektronika, 2019 Volume 49, Number 6, Pages 545–551 (Mi qe17065)

This article is cited in 2 papers

Selection of papers presented at the Symposium 'Semiconductor Lasers: Physics and Technology'

Electronic and optical properties of hybrid GaN/por-Si(111) heterostructures

P. V. Seredinab, D. L. Goloshchapova, D. S. Zolotukhina, A. S. Len'shina, A. M. Mizerovc, I. N. Arsent'evd, H. Leistee, M. Rinkee

a Voronezh State University
b Ural Federal University named after the First President of Russia B. N. Yeltsin, Ekaterinburg
c Saint Petersburg Academic University of the Russian Academy of Sciences, St. Petersburg
d Ioffe Institute, St. Petersburg
e Karlsruhe Nano Micro Facility, Germany

Abstract: Using plasma-assisted molecular beam epitaxy (PA MBE) of nitrogen, we obtained integrated heterostructures based on a self-ordered array of GaN nanocolumns on Si substrates with a sufficiently uniform distribution of diameters, which subsequently coalesced into a 2D layer. The use of a 'compliant' por-Si substrate for GaN synthesis using PA MBE allowed us to obtain a crack-free GaN layer, prevent the Ga-Si etching process, maintain a sharp smooth Si – GaN interface, and also partially suppress the generation of tensile stresses caused by cooling the heterostructure from growth temperature to room temperature by its relaxation at the Si – GaN nanoporous interface, which had a positive effect on its optical properties in the UV region.

Keywords: gallium nitride, nanocolumns, molecular beam epitaxy, porous silicon, optical and electronic properties.

Received: 04.04.2019


 English version:
Quantum Electronics, 2019, 49:6, 545–551

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