Theory of differential and integral scattering of laser radiation by a high-precision dielectric surface

A theoretical study was made of the differential and integral scattering of light by high-precision optical dielectric surfaces. The technique of modified curvilinear transformation was employed to derive the expressions that correspond to the effect of irregularity slope fluctuations, which is not considered in the conventional vector theory of differential scattering. It is shown that it is possible to neglect the effect of irregularity slope to a high degree of accuracy and thereby resort to conventional vector theory to determine the roughness parameters. Expressions were derived for the total integral scattering for different ratios between the correlation length and the wavelength of the scattered radiation.