B. Jeong, B. Lee, J. H. Kim, J. A. Choi, J. H. Yang, E. G. Sall', J. W. Kim, D. Heo, J. Jang, G. H. Kim, V. E. Yashin, “Drilling of sub-100 μm hourglass-shaped holes in diamond with femtosecond laser pulses”, Kvantovaya Elektronika, 2020, Volume 50, Number 2,Pages <nobr>201

This article is cited in 15 papers

Laser applications and other topics in quantum electronics

Drilling of sub-100 μm hourglass-shaped holes in diamond with femtosecond laser pulses

B. Jeong^ab, B. Lee^a, J. H. Kim^c, J. A. Choi^c, J. H. Yang^a, E. G. Sall'^a, J. W. Kim^a, D. Heo^a, J. Jang^bd, G. H. Kim^a, V. E. Yashin^e

^a Electro-Medical Device Research Center, Korea Electrotechnology Research Institute, Republic of Korea
^b Department of Creative IT Engineering, Pohang University of Science and Technology, Republic of Korea
^c GK UP, Republic of Korea
^d School of Interdisciplinary Bioscience and Bioengineering, Pohang University of Science and Technology, Republic of Korea
^e All-Russian Research Center "S. I. Vavilov State Optical Institute", St. Petersburg

Abstract: We present images of microholes drilled in diamond using a homemade femtosecond Yb : KGW laser. We use a femtosecond laser source emitting pulses with a duration of 230 fs at a wavelength of 1030 nm, the focusing spot size amounting to 8.9 μm. The effect of the pulse energy and the number of pulses on the microhole geometry (hole diameter, circularity, taper angle, and drilling quality) is evaluated. The obtained results demonstrate the feasibility of drilling of hourglass-shaped holes in a diamond sample, which have similar diameters at the hole entrance (92 μm) and exit (95 μm), but a much smaller diameter (28 μm) at a certain waist section inside the hole.

Keywords: femtosecond laser, ultrafast laser, laser micromachining, laser drilling, diamond.

Received: 18.07.2019
Revised: 14.10.2019