Broadband low-density radiation source utilising argon, krypton, and xenon chlorides

The parameters of a broadband excimer radiation source emitting in the 175–310-nm range and excited by a dc glow discharge in an Ar–Kr–Xe–Cl₂ mixture are studied. The emission spectrum of the discharge consists of the ArCl, KrCl, XeCl, and Cl₂ molecular emission bands. The optimal partial pressure of argon in the mixture is 1.3 kPa, those of krypton and xenon are 0.24 kPa each, and the partial chlorine pressure is in the 0.15–0.30-kPa range. The UV–-VUV radiation power emitted from the entire side surface of the discharge tube amounts to 4–6 W for an efficiency of 15%–25%. The radiation source is of interest for applications in photometry, microelectronics, photochemistry, and medicine.